PRECISION MACHINING

Precision Manufacturing

by David Dornfeld and Dae-Eun Lee
ISBN 978-0-387-32467-8
Springer 780 p. Hardcover
$129.00 + s&h
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A comprehensive book that provides an overview of machining capabilities needed to mass produce precision components with micro- and nano-meter scale dimensions, tolerances and surface finishes. Drawing from experiences with techonologies that drive contemporary precision manufacturing, Dornfeld and Lee present all the key issues that shape advanced machining techologies for traditional and advanced materials. Here is an overview of the tools, processes,and evolving technologies that make it possible economically to produce precision components. Significant issues such as metrology, vibration, sensors, error mapping and process philosphies are covered in depth. Also included are details of CMP and polishing processes as well as other abrasive applications.
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Table of Contents


1.Introduction to precision manufacturing
1. 1 Precision engineering 1
1.2 Precision manufacturing 2
1.3 Competitive drivers of precision manufacturing 7
1.4 Historical developments in manufacturing 9

11 Machine design for precision manufacturing
2.1 Background on machine design for manufacturing 37
2.2 Philosophy of precision machine design 39
2.3 Sources of error ? overview 41

III. Principles of measurement
3.1 Definition of terms ? accuracy, repeatibility, and resolution 49
3.2 Metrology and measurement 57
3.3 Abb6's principle 64
3.4 Metrology techniques 67
3.5 Subsurface damage 112

IV.Mechanical errors
4.1 Introduction 121
4.2 Errors due to machine elements (excluding bearings) 123
4.3 Kinematic design 128
4.4 Structural compliance 143
4.5 Bearings and spindles 153

V.Thermal errors
5.1 Background on the thermal error problem 167
5.2 Thermal effects in precision engineering 171
5.3 Determining the effect of temperature other than 20'C 180
5.4 Conductive, convective, and radiative heat transfer parameters 193
5.5 Specific heat sources and examples of thermal problems 196
5.6 Environmental control of precision machinery 202
5.7 Thermal effects and metrology 208
5.8 Observations 215

VI.Error mapping and error budgets
6.1 Introduction 217
6.2 Error mapping 218
6.3 Error budget 232

VII Error due to compliance and vibration
7.1 Introduction 239
7.2 Excitations in machine tools 243
7.3 Weight deformation 246
7.4 Cutting force deformation 249
7.5 Forced vibrations 272
7.6 Self?excited vibrations (chatter) 273
7.7 Advanced analysis 292

VIII. Sensors for precision manufacturing
8.1 Introduction 295
8.2 Overview of sensors in manufacturing 300
8.3 New developments in signal and information processing for tool condition monitoring 308
8.4 Acoustic emission in manufacturing 320
8.5 Signal processing, feature extraction and sensor fusion 334
8.6 Applications of signal processing and sensor fusion 349
8.7 Sensor integration using neural networks for intelligent tool condition monitoring 358
8.8. The need for engineering models to design and predict the performance of in?process sensors 369
8.9 Basic sensor classification and new sensing technologies 372
8. 10 Applications of sensors in precision manufacturing 384
8.11 Summary 422

IX. Process planning for precision manufacturing
9.1 Manufacturing system characteristics 425
9.2 Process planning basics 435
9.3 Process capability 438
9.4 Cp as a planning metric 444
9.5 Legacy?system integration for precision manufacturing 451
9.6 Future integration for precision manufacturing process planning 452

X. Precision machining processes
10. 1 Introduction 455
10.2 Influence of machining parameters, work material, and tool geometry 462
10.3 Process operating conditions 478
10.4 Precision mfg. processes?diamond turning/milling 482
10.5 Abrasive processes ? fixed and loose 505
10.6 Non?traditional processes 551

XI.Precision manufacturing applications and challenges
11. 1 Introduction 555
11.2 Basic semiconductor device manufacturing 559
11.3 Applications of semiconductor manufacturing ? MEMS 570
11.4 Nanotechnology 572
11.5 MEMS and nanotechnology applications 600
11.6 Micro?machining and small scale defects 604
11.7 Burrs ? preventing and minimizing burr formation in precision components 646
11.7.4 Summary and conclusions 662

XII. Future of precision manufacturing
12.1 Introduction 665
12.2 The manufacturing pipeline 666
12.3 Sustainable design/environmentally conscious design and manufacturing 669
12.4 Environmentally conscious design of precision machines 693
12.5 Summary comments/conclusion 701
References 705

Index 765

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